WF6 as a Key Precursor in Tungsten-Based Thin Films: Pathways, Challenges, and Process Control
WF6 as a Key Precursor in Tungsten-Based Thin Films: Pathways, Challenges, and Process Control BY Tao, Published August 29, 2025 Introduction: The Role of WF6 in Modern Semiconductor Manufacturing As a seasoned researcher with over two decades in the field of specialty gases, I’ve witnessed the evolution of materials science firsthand, particularly in the realm…