Xenon Difluoride XeF₂ Selectivity: How Xenon Difluoride Achieves Precision Etching Without Damaging Microstructures
Xenon Difluoride XeF₂ Selectivity: How Xenon Difluoride Achieves Precision Etching Without Damaging Microstructures BY Tao, Published Jan 3, 2026 In the intricate, nanometer-scale world of semiconductor manufacturing and Micro-Electro-Mechanical Systems (MEMS), the ability to remove material is commonplace. We have dozens of ways to blast, dissolve, or erode silicon. However, the true art…
