Innovations in WF6 Delivery and Containment: Reducing Residuals, Leakage, and Cross-Contamination
Innovations in WF6 Delivery and Containment: Reducing Residuals, Leakage, and Cross-Contamination BY Tao, Published Sep 2, 2025 Introduction Tungsten hexafluoride (WF6) is a cornerstone of the semiconductor industry, valued for its role in chemical vapor deposition (CVD) processes to create low-resistivity tungsten films used in metallic interconnects. Its unique properties—high density, toxicity, and corrosiveness—make it…