Description
Product Name: Silicon Tetrafluoride SiF4 Electronic 99.999%
CAS: 7783-61-1
Purity: 99.999 %
Product specifications: 4L/8L/10L/40L/47L/50L
Product form: Silicon Tetrafluoride SiF4
Main use: Silicon Tetrafluoride (SiF4): Used in the production of optical fibers and as a fluorinating agent.
Availability : In Stock
Certificate of Analysis
Product Name: | Silicon Tetrafluoride (SiF4) | ||
Product Grade: | Electronic 99.999 % | ||
Cylinder Size: | 47 L | ||
Valve: | DISS 642 | ||
Gas Content: | 30 Kgs | ||
ITEMS | UNIT | SPECIFICATION | |
Purity | % | ≥ 99.999 | |
O2 | ppm | ≤ 1.0 | |
N2 | ppm | ≤ 4.0 | |
H2 | ppm | ≤ 1.0 | |
CO | ppm | ≤ 0.5 | |
CO2 | ppm | ≤ 3.0 | |
THC ( CH4 ) | ppm | ≤ 1.0 |
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Applications and Industries
1. Semiconductor Manufacturing:
- Etching: SiF4 is used to etch various materials like silicon, silicon nitride, and tantalum silicide during the fabrication of semiconductor devices.
- Chemical Vapor Deposition (CVD): SiF4 serves as a silicon source for CVD processes, enabling the deposition of thin films of silicon-containing materials.
- Doping: SiF4 can be used as a dopant source for creating specific electrical properties in semiconductors.
- Plasma Etching: SiF4 is also used in plasma etching processes for cleaning and shaping semiconductor materials.
2. Optical Applications:
- Optical Fibers: SiF4 is used in the production of optical fibers, enhancing their performance and durability.
- Optical Coatings: SiF4 contributes to anti-reflective coatings, optical filters, and beam splitter
3. Other Applications:
- Fluorochemicals: SiF4 is a precursor in the production of various fluorochemicals.
- Specialty Glasses: SiF4 is used in the synthesis of specific types of glass.
- Organic Synthesis: SiF4 can act as a catalyst or reagent in certain organic reactions.
- Fluosilicic Acid: SiF4 is also used in the production of fluosilicic acid and its salts.
- Phosphors and Luminescent Materials: SiF4 is used in the production of phosphors and other luminescent materials.