Description
Product Name: 11B Boron Trifluoride , 11BF3
Category: Isotope Products
CAS: 7637-07-2
Purity: 99.99 %
Enrichment: > 99.8 % atom 11B
Product specifications:1m3，10m3，100m3
Product form: Boron Trifluoride gas
Main use: 11B Boron Trifluoride , 11BF3 shall be used as a chip ion implantation material
Certificate of Analysis
| Product Name： | 11B Boron Trifluoride 11BF3 | ||||
| Product Grade： | 99.99% | ||||
| Enrichment： | 99.80% | ||||
| Valve: | 1/4″ VCR or DISS 642 | ||||
| Gas content | 20 Kgs | ||||
| ITEMS | UNIT | SPEC. | RESULT | ||
| Purity | % | ≥ 99.99 | 99.993 | ||
| Enrichment Test | |||||
| ITEMS | UNIT | SPEC. | RESULT | ||
| B -11 | AT % | > 99.8 | 99.84 | ||
11B Boron Trifluoride ,11BF3 (part of Isotope Products and Isotope gases) is an isotopically enriched material used for silicon doping. China Isotope Development Co.,Ltd pursuit to produce high purity and higher 11B enrichment, to be suited for semiconductor manufacturing, including solar applications and used in the ion implantation process as the most commercially preferred p-dopant for silicon.
How we supply 11B Boron Trifluoride, 11BF3
China Isotope Development Co.,Ltd focus on Isotope products & Isotope gases,like 11B Boron Trifluoride, 11BF3 and offer a proven supply chain and experience supplying material to the industry. Additionally, we can provide our customers with consistent product quality and the ability to custom engineer products for your unique applications.
Applications and Industries
- Silicon-based wafers
- Ion implant
- Semiconductor industry
- Solar industry
* * * Can’t Find What You Are Looking For ? Contact Us tao.hu@asiaisotope.com As We Still Might Be Able To Make It * * *
