Description
Product Name: Hexafluorobutadiene C4F6 Gas Perfluorobutadiene Halocarbon 2316
CAS: 685-63-2
Purity: 99.99% ~ 99.999%
Product specifications: 4L/8L/10L/40L/47L/50L
Product form: Hexafluoro-1,3-butadiene C4F6 Gas Perfluorobutadiene Halocarbon 2316
Main use: Hexafluoro-1,3-butadiene C4F6 Gas Perfluorobutadiene Halocarbon 2316 is used as an intermediate in the production of certain fluoropolymers.
Availability : In Stock
What is Hexafluorobutadiene C4F6 Gas?
Hexafluoro-1,3-butadiene (C4F6) is used as an environmentally friendly etching gas with a low greenhouse effect. It is a relatively new etch gas for the manufacturing of semiconductor devices, especially in critical etch processes that need high aspect ratios and selectivity, mainly in dry etching processes for semiconductors.
Certificate of Analysis
| Component | Unit | Specification | |
| C4F6 | % | ≥99.99 | |
| N2 | ppm | ≤40 | |
| O2+Ar | ppm | ≤10 | |
| CO2 | ppm | ≤20 | |
| Other Fluorocarbon | ppm | ≤200 | |
| H2O | ppm | ≤5 | |
| Acidity as HF | ppm | ≤5 | |
| IPA | ppm | ≤5 | |
NOTE : For other grade 99.999% , don’t hesitate to call or contact tao.hu@asiaisotope.com for more technical details.
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Hexafluorobutadiene
What are applications of Hexafluorobutadiene （C4F6 Gas） ?
Hexafluoro-1,3-butadiene C4F6 Gas is a relatively new etch gas for the manufacturing of semiconductor devices, especially in critical etch processes that need high aspect ratios and selectivity, mainly in dry etching processes for semiconductors.
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Used as a dry etching gas in silicon-based integrated circuits
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Many application advantages in plasma, ion beam or sputter dry etching in semiconductor devices manufacturing.
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High aspect ratio etching
Why Choose Our Hexafluorobutadiene （C4F6 Gas）?
High Purity & Stability
Consistent high purity 99.999%+ grades that protects your process, equipment, and final product from contamination-related failures.
Reliable & Stable Supply
As a professional supplier, we offer better supply security and scalability compared to traders and middlemen who depend on others for stock.
Lower Total Cost of Ownership
Direct supply = competitive price + fewer rejections + less downtime + higher yield. You save money where it matters most — not just on the product price.
Full Traceability & Compliance
Complete production traceability and international certifications that meet the demanding requirements of pharmaceutical and electronics industries.
Technical Expertise
Real manufacturer knowledge to support your specific application — not just selling chemicals, but helping you use them optimally.
Packaging & Delivery Options
Standard Package: 1Kg / 5Kg / 25Kg / 100Kg (Custom packaging available upon request)
Customized package, please contact us for details.
Frequently Asked Questions (FAQs)
Q1. What is Hexafluorobutadiene in simple terms?
A1. It is a colorless, odorless gas that is stored under pressure in cylinders. It is mainly used in the semiconductor industry for a process called “etching,” which helps create tiny circuit patterns on computer chips.
Q2. What is Hexafluorobutadiene used for?
A2. Its primary use is as an etching gas in semiconductor manufacturing. It helps create high-precision, fine patterns in memory chips like 3D NAND flash memory. It is also used to make certain fluorinated rubbers and resins.
Q3. Is Hexafluorobutadiene dangerous?
A3. Yes. It is highly flammable and toxic if inhaled. It is also stored as a liquefied gas under pressure, meaning the container may explode if heated. Contact with the liquid form can cause frostbite.
Q4. Why is Hexafluorobutadiene considered an environmentally friendly gas?
A4. It has a very low Global Warming Potential (GWP) — some sources report a GWP of 0.004, and it breaks down in the atmosphere very quickly, in less than two days. This makes it much better for the environment compared to older etching gases.
Q5. What does Hexafluorobutadiene look and smell like?
A5. It is a colorless gas with no detectable odor. Because it is odorless, you cannot rely on your sense of smell to detect a leak.
Q6. How should Hexafluorobutadiene be stored?
A6. It must be stored in a cool, well-ventilated area. The storage temperature should not exceed 50°C, and containers must be kept tightly closed. It should be kept away from direct sunlight, fire, and oxidizing agents.
Q7. How is Hexafluorobutadiene transported?
A7. It is transported as a “liquefied gas, toxic, flammable”. The UN number for transport is typically UN 3160 or UN 3161. It must be shipped according to strict regulations for compressed and liquefied toxic gases.
Q8. What are the common packaging options?
A8. It is commonly packaged in steel cylinders, such as 10L or 47L sizes. Custom packaging is also available upon request.
Q9. What are the main hazards to be aware of?
A10. The main hazards are that it is extremely flammable (it can ignite easily), toxic if inhaled, and stored as a gas under pressure that may explode if heated. It can also cause skin and eye irritation.
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