Description
Product Name: Octafluorocyclopentene C5F8 / Perfluorocyclopentene
CAS: 559-40-0
Purity: 4N ~5N
Product specifications: 4L/8L/10L
Product form: Octafluorocyclopentene C5F8 / Perfluorocyclopentene
Main use: Plasma etching process.
Availability : In Stock
What is Octafluorocyclopentene (C5F8) ?
Octafluorocyclopentene (C5F8) is a toxic, non-flammable, low boiling point (81 °F) colorless liquified gas with a slight distinctive odor. Octafluorocyclopentene (C5F8) is mainly used in Plasma Etching Process , especially in Advanced Process Etching of14nm and below process nodes, which is suitable for precise etching of high aspect ratio structures (such as FinFET, 3D NAND memory cells).
Certificate of Analysis
| Component | Unit | Specification |
| C5F8 | % | ≥99.99 |
| C4F6 | ppm | ≤ 50 |
| O2 + Ar | ppm | ≤ 20 |
| N2 | ppm | ≤ 100 |
| H2O | ppm | ≤ 10 |
China Isotope Development Co.,Ltd ,as a emerging fluorinated specialty chemicals supplier, was supplying Octafluorocyclopentene (C5F8) to serve clients step by step , gaining their trust ranging from its quality / price / delivery. We know clients need, to solve their questions on site , and pursuit to continue serving clients better.
To conduct our commitment of being a reliable partner to offer solutions when you need special chemicals. Visit www.asiaisotopeintl.com for more information or call us for instant communications.
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Octafluorocyclopentene C5F8
What are applications of Octafluorocyclopentene (C5F8) ?
Octafluorocyclopentene (C5F8) is a toxic, non-flammable, low boiling point (81 °F) colorless liquified gas with a slight distinctive odor. Octafluorocyclopentene () is mainly used in Plasma Etching Process , especially in Advanced Process Etching of14nm and below process nodes, which is suitable for precise etching of high aspect ratio structures (such as FinFET, 3D NAND memory cells).
1. Plasma Etching Process (Main Application)
- Advanced Process Etching: 14nm and below process nodes, especially suitable for precise etching of high aspect ratio structures (such as FinFET, 3D NAND memory cells)
- Pattern Transfer: Achieving precise replication of nanoscale patterns on materials such as silicon, silicon dioxide, and silicon nitride
- Dry Etching: As a plasma etching gas, it combines physical bombardment and chemical reaction to achieve anisotropic etching.
2. Semiconductor Equipment Cleaning
- Cavity Cleaning: Used for removing chamber residues after CVD/PECVD, replacing traditional PFC cleaning gases and reducing greenhouse gas emissions by more than 95%.
- Pipeline Cleaning: Suitable for precision cleaning of semiconductor process pipelines to prevent cross-contamination.
| Application Scenarios | Advantages | Technical Specifications |
|---|---|---|
| FinFET Structure Etching | Precisely control fin width and verticality, preventing sidewall erosion | Sidewall angle: 88°, line width control precision: 0.1μm level |
| 3D NAND High Aspect Ratio Holes/Grooves | High selectivity, reducing photoresist consumption and improving yield | Silicon/photoresist selectivity: ≥15:1, aspect ratio: ＞30:1 |
| DRAM Capacitor Structure | Reduce residues and enhance structural stability | Etching uniformity: ＞98%, residues: ＜0.01ppm |
| Advanced Interconnect Structure | Precisely control via and trench profiles, reducing RC delay | Critical dimension (CD) control precision: ＜5nm |
Why Choose Our Octafluorocyclopentene()?
High Purity & Stability
Consistent high purity 99.99%+ grades that protects your process, equipment, and final product from contamination-related failures.
Reliable & Stable Supply
As a professional supplier, we offer better supply security and scalability compared to traders and middlemen who depend on others for stock.
Lower Total Cost of Ownership
Direct supply = competitive price + fewer rejections + less downtime + higher yield. You save money where it matters most — not just on the product price.
Full Traceability & Compliance
Complete production traceability and international certifications that meet the demanding requirements of pharmaceutical and electronics industries.
Technical Expertise
Real manufacturer knowledge to support your specific application — not just selling chemicals, but helping you use them optimally.
Packaging & Delivery Options
Standard Package: 10 kg / 40 kg
Customized package, please contact us for details.
Frequently Asked Questions (FAQs)
Q1. What is Octafluorocyclopentene ()?
A1. Octafluorocyclopentene (CAS 559-40-0) is a perfluorinated cyclic olefin, also known as perfluorocyclopentene. It is a colorless liquid or gas with a slight distinctive odor. Its molecular formula is C₅F₈ and molecular weight is 212.04 g/mol.
Q2. What is the main application of Octafluorocyclopentene ()?
A2. is primarily used as a high‑performance etching gas in the semiconductor industry. It is particularly suitable for critical etch processes of dielectric materials in advanced semiconductor manufacturing, including 3D NAND and DRAM memory devices. It is also used as a monomer for fluoropolymers and in the synthesis of specialty chemicals.
Q3. Is Octafluorocyclopentene () flammable?
A3. No. Octafluorocyclopentene is non‑flammable.
Q4. What are the hazards associated with Octafluorocyclopentene ()?
A4. is classified as a toxic liquefied gas. Hazard statements include:
- Fatal if inhaled
- Causes serious eye damage/irritation
- Toxic if swallowed or in contact with skin
- May cause damage to organs (central nervous system, cardiovascular system, respiratory system, liver, lungs) through prolonged or repeated exposure
- Contains gas under pressure; may explode if heated
- May displace oxygen and cause rapid suffocation
Q5. How should Octafluorocyclopentene () be stored?
A5. should be stored under refrigeration at 0–10 °C. It is heat sensitive, so it must be kept away from heat sources. Containers should be kept tightly closed and stored in a well‑ventilated area. Storage should be locked up.
Q6. What personal protective equipment (PPE) is required when handling Octafluorocyclopentene ()?
A6. Required PPE includes:
- Protective gloves and protective clothing
- Eye protection / face protection
- Respiratory protection
- Use only in a well‑ventilated area or outdoors
- Do not breathe mist or vapors
Q7. How is Octafluorocyclopentene () shipped and what are the typical packaging options?
A7. is shipped as a liquefied gas at its vapor pressure. Standard packaging options include 1kg, 5kg, 25kg, and 100kg cylinders.
Q8. What is the purity level of commercially available Octafluorocyclopentene ()?
A8. High‑purity electronic grades can reach 99.99% for semiconductor applications.
Q9. What are the synonyms for Octafluorocyclopentene?
A9. Common synonyms include:
- Perfluorocyclopentene
- 1,2,3,3,4,4,5,5‑Octafluorocyclopentene
- Cyclopentene, octafluoro‑
- FC‑C1418
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