Description
Product Name: Disilane Si2H6 Gas
CAS :1590-87-0
Purity: 99.998 %
Product specifications: 4L/8L/10L/40L/47L/50L
Product form: Disilane Si2H6 Gas
Main use: Disilane (Si2H6): Used as a silicon source in the semiconductor industry.
Availability : In Stock
What is Disilane (Si2H6 )?
Disilane (Si2H6 ) is a key material in advanced semiconductor manufacturing and primarily used in the latest and most sophisticated generation of integrated circuits such as NAND Flash memory. It deposits a-Si and silicon dioxide at a lower temperature than silane enabling its use in smaller IC’s with a thermal budget constraint. Disilane can also be reacted with germanium in deposition tools to produce SiGe layers that strain the silicon and improve the performance of single-digit nano scale integrated circuits (ICs).
Certificate of Analysis
| Component | Unit | Specification |
| Si2H6 | % | ≥99.998% |
| SiH4 | ppm | ≤ 200 |
| H2 | ppm | ≤ 100 |
| N2 | ppm | ≤ 1.0 |
| O2+Ar | ppm | ≤ 1.0 |
| He | ppm | ≤ 1.0 |
| CO | ppm | ≤ 1.0 |
| CO2 | ppm | ≤ 1.0 |
| Higher-Order Silanes | ppm | ≤ 50 |
| Chlorosilanes | ppm | ≤ 0.2 |
| Siloxane | ppm | ≤ 5.0 |
| THC(as CH4) | ppm | ≤ 1.0 |
| H2O | ppm | ≤ 1.0 |
We are profressional to offer Disilane Si2H6 Gas to the Semiconductor and High-efficiency PV Cells market in Y Cylinder, Tube Trailer and ISO Tank over the past years, gaining their trust ranging from its quality / price / delivery. We know each parameters of product, to solve their questions on site , and pursuit to continue serving clients better.
For bulk shipment, dont hesitate to call or contact tao.hu@asiaisotope.com for a solution with more technical details.
To conduct our commitment of being a reliable partner to offer solutions when you need specialty gases & Chemicals. Visit us www.asiaisotopeintl.com.
Dislane
What are applications of Disilane (Si2H6 ) ?
Disilane (Si2H6) is a key material in advanced semiconductor manufacturing, specifically in chemical vapor deposition (CVD) processes for creating thin films. It’s used as a silicon source precursor in various applications, including the production of integrated circuits, solar cells, and other silicon-based materials. Disilane offers advantages over silane (SiH4) in terms of film density, deposition smoothness, and lower deposition temperatures, leading to improved efficiency and performance in these technologies.
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Epitaxial Growth:
Disilane is used to grow thin, crystalline silicon layers (epitaxial growth) on semiconductor wafers, which is crucial for creating devices like transistors and diodes.
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Amorphous Silicon Deposition:
It’s a precursor for depositing amorphous silicon (a-Si:H), a material used in solar cells and thin-film transistors.
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SiGe Alloys:
Disilane can be combined with germanium precursors to create silicon-germanium alloys (SiGe), which are used to enhance transistor performance in advanced microchips.
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DRAM and NAND Flash:
Disilane is adopted in various critical memory chip manufacturing steps, including self-aligned contacts for DRAM and gate polysilicon deposition for flash memory.
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Gate Polysilicon Deposition:
In logic devices, disilane is used in the first layer of gate polysilicon deposition, a key component in integrated circuits.
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Low-Temperature Processing:
Disilane allows for lower temperature deposition compared to silane, enabling the creation of smaller, more complex devices with tighter thermal budgets.
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Solar Cells:
Disilane is used in the production of silicon-based solar cells, contributing to the creation of efficient photovoltaic devices.
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Silicon Microspheres and Photonic Crystals:
Disilane is also involved in the fabrication of silicon microspheres and photonic crystals, which have applications in various optical and electronic devices.
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Nanotechnology:
Disilane is used in nanotechnology processes for uniform thin film deposition.
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Higher Film Density:
Disilane typically results in denser and more compact silicon films compared to silane.
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Faster Deposition Rates:
Disilane can deposit films at a faster rate than silane.
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Lower Deposition Temperatures:
Disilane allows for lower temperature processing, which is advantageous for many applications.
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Improved Smoothness and Continuity:
Disilane can lead to smoother and more continuous films, which is important for device performance.
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Enhanced Dopant Incorporation:Disilane can improve the incorporation of dopants into silicon films, which is essential for controlling electrical properties.
Why Choose Our Disilane Gas?
- Qualified & Approved by Multinational Companies
We are already a trusted and audited supplier to global multinational corporations. Our Disilane has passed their strict quality, performance, and reliability tests. New customers benefit from this proven track record.
- Superior Purity & Stability
Consistent ultra-high purity Disilane(99.999%+ grades) that protects your process, equipment, and final product from contamination-related failures.
- Reliable & Stable Supply
As a professional supplier, we offer better supply security and scalability compared to traders and middlemen who depend on others for stock.
- Lower Total Cost of Ownership
Direct supply = competitive price + fewer rejections + less downtime + higher yield. You save money where it matters most — not just on the gas price.
- Full Traceability & Compliance
Complete production traceability and international certifications that meet the demanding requirements of Semiconductor Manufacturing and Photovoltaic Industry.
- Technical Expertise
Real manufacturer knowledge to support your specific application — not just selling gas, but helping you use it optimally.
Packaging & Delivery Options
| Cylinder Size | Water Capacity | Gas Volume (approx.) | Typical Use Case |
|---|---|---|---|
| 4L / 8L | Small | 2 Kgs | R&D / Lab |
| 10L | Medium | 5 Kgs | Pilot & Medical |
| 40L – 50L | Large | 10 Kgs | Industrial & Semiconductor |
Frequently Asked Questions (FAQs)
Q1: What is the purity level of your Disilane gas?
A: We produce ultra-high purity Disilane gas up to 99.999% (5N) and higher, depending on customer requirements. As the direct supplier, we maintain strict quality control for consistent purity with very low levels of impurities such as oxygen, moisture, and hydrocarbons.
Q2: Are you qualified by multinational companies?
A: Yes. We are an approved and qualified supplier to several global multinational corporations. Our Disilane has successfully passed their rigorous audits, quality tests, and long-term performance evaluations.
Q3: What industries do you supply Disilane gas to?
A: We supply ultra high-purity Disilane for Semiconductor Manufacturing and Photovoltaic Industry.
Q4: Do you provide certifications and traceability?
A: Yes. Every batch comes with full traceability from production to delivery. We provide necessary certificates including Certificate of Analysis (COA), and comply with ISO 9001 and industry-specific standards.
Q5: Is your Disilane more expensive than other suppliers?
A: While we focus on premium quality, our price is highly competitive. Customers usually achieve lower total cost of ownership due to fewer batch failures, higher process yield, and reduced downtime.
Q6: What packaging options do you offer?
A: We supply Disilane in high-pressure cylinders in various sizes to suit small R&D needs to large industrial volumes.
Q7: How fast can you deliver?
A: Lead time depends on quantity and destination. We maintain strategic stock and have global logistics experience serving multinational customers worldwide.
***** Ready to Order Ultra High Purity Disilane Gas? *****
- Get competitive pricing
- Fast response within 24 hours
- Technical consultation available
Contact Us tao.hu@asiaisotope.com

