XeF2 Vapor Phase Etching: Why High-Selectivity Silicon Removal Transforms Semiconductor Manufacturing
XeF2 Vapor Phase Etching: Why High-Selectivity Silicon Removal Transforms Semiconductor Manufacturing BY Tao, Published Jan 3, 2026 Introduction: The Unseen Revolution in Chip Fabrication Over the past 3 years, China Isotope Development Co Ltd was starting to supply Xenon Difluoride (XeF₂) to China domestic clients, I have observed that true breakthroughs in semiconductor manufacturing…
