Description
Product Name: Nitrogen Trifluoride NF3 Gas
CAS: 7783-54-2
Purity: 4N~5N
Product specifications: 4L/8L/10L/40L/47L/50L / Y Cylinder / Tube Trailer
Product form: Nitrogen Trifluoride NF3 Gas
Main use: Nitrogen Trifluoride NF3 is used in the semiconductor industry for plasma etching.
Availability : In Stock
Certificate of Analysis
| Component | Unit | Specification | |
| NF3 | % | ≥99.99 | |
| N2 | ppm | ≤5 | |
| O2+Ar | ppm | ≤5 | |
| CF4 | ppm | ≤50 | |
| CO | ppm | ≤5 | |
| CO2 | ppm | ≤5 | |
| N2O | ppm | ≤5 | |
| SF6 | ppm | ≤2 | |
| H2O | ppm | ≤1 | |
| HF | ppm | ≤1 | |
We are profressional to offer Nitrogen Trifluoride NF3 Gas to the market in DOT 47L Cylinder , Y Cylinder , Tube Trailer over the past years, gaining their trust ranging from its quality / price / delivery. We know each parameters of product, to solve their questions on site , and pursuit to continue serving clients better.
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