Description
Product : Phosphorus Trifluoride PF3 gas
CAS: 7783-55-3
Purity: 99.9% ~ 99.99%
Product specifications: 2L/4L/8L/10L/40L/47L / SDS Cylinder
Product form: Phosphorus Trifluoride PF3 gas
Main use: Phosphorus Trifluoride PF3 is used in the production of certain chemicals and as a doping agent in semiconductors.
Availability : In Stock
Certificate of Analysis
| ANALYSIS RESULT | ||
| Analysis Item | Standard Damend | Analysis Result |
| PF3 | 99.9 % | > 99.9% |
| H2 | ≤100 ppm | 0.228 ppm |
| O2+Ar | ≤50 ppm | 0.318 ppm |
| N2 | ≤50 ppm | 13.5 ppm |
| CH4 | ≤50 ppm | 0.002 ppm |
| CO | ≤50 ppm | 0.007 ppm |
| CO2 | ≤100 ppm | N/A |
| HF | ≤300 ppm | 3.3 ppm |
| HCL | ≤300 ppm | 3.7 ppm |
NOTE : For other grade 99.99% , dont hesitate to call or contact tao.hu@asiaisotope.com for more technical details.
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Applications and Industries
Phosphorus trifluoride PF3 is a versatile chemical compound primarily used as a ligand in metal complexes and as a reagent in the chemical industry. Phosphorus trifluoride PF3 also finds applications in the semiconductor industry for etching and as a dopant, as well as in the production of various phosphorus-containing compounds.
1. Ligand in Metal Complexes:
Phosphorus trifluoride PF3 is a strong π-acceptor ligand, forming complexes with transition metals in low oxidation states. This property is similar to that of carbon monoxide (CO), and PF3 can bind to iron in hemoglobin, similar to CO, potentially causing respiratory distress.
2. Chemical Industry:
Phosphorus trifluoride PF3 serves as a precursor for synthesizing various phosphorus-containing compounds and is also used in the production of some pesticides.
3. Semiconductor Industry:
Etching: Phosphorus trifluoride PF3 is used in plasma etching processes to selectively remove materials from semiconductor wafers.
Doping: Phosphorus trifluoride PF3 acts as a dopant gas in the production of n-type semiconductors, modifying their electrical properties.
Chamber Cleaning: Phosphorus trifluoride PF3 can be used in chemical vapor deposition (CVD) tool cleaning processes.
4. Fluorination Processes:
Phosphorus trifluoride PF3 can act as a fluorinating agent in the synthesis of fluorinated compounds, particularly in pharmaceuticals and agrochemicals.
5. Research and Development:
Its unique chemical properties make it valuable for studying various chemical reactions and processes, potentially leading to new materials and technologies
