Dichlorosilane DCS SiH2Cl2 99.99 % Precursor
Product Name : Dichlorosilane DCS SiH2Cl2 99.99 % Precursor
CAS :4109-96-0
Purity: 4N
Product specifications: 2 gal /4 gal /10 gal /….as per demand
Product form: Dichlorosilane DCS SiH2Cl2 99.99 % Precursor
Main use: it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing.
Availability : In Stock
