Xenon Difluoride (XeF₂) in MEMS Fabrication: The Gold Standard for Sacrificial Layer Release Etching

Xenon Difluoride (XeF₂) in MEMS Fabrication: The Gold Standard for Sacrificial Layer Release Etching BY Tao, Published Jan 2, 2026   Introduction: Revolutionizing Microelectromechanical Systems with XeF2 Xenon Difluoride (XeF2) is a chemical compound composed of xenon and fluorine, represented by the formula XeF2. Among all fluorides, Xenon Difluoride (XeF₂) stands out as a cornerstone in…