Description
Product Name: Trichlorosilane TCS SiHCl3 99.99 % ~ 99.99999 % Precursor
CAS :10025-78-2
Purity: 4N~7N
Product specifications: 2 gal /5 gal /10 gal/ ……..as per demand
Product form: Trichlorosilane TCS SiHCl3 99.99 % ~ 99.99999 % Precursor
Main use: Trichlorosilane (CH3SiCl2H): Used in the production of silane resins and silicones.
Availability : In Stock
What is Trichlorosilane (TCS) ?
Trichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid.
Certificate of Analysis
7.0N Trichlorosilane
| Component | Unit | Specification |
| Al | ppb | <5 |
| B | ppb | <0.05 |
| Ca | ppb | <5 |
| Co | ppb | <1 |
| Cr | ppb | <5 |
| Cu | ppb | <5 |
| Fe | ppb | <10 |
| Hg | ppb | <1 |
| Mg | ppb | <5 |
| Mn | ppb | <1 |
| Na | ppb | <5 |
| Ni | ppb | <5 |
| Pb | ppb | <1 |
| Zn | ppb | <5 |
| SiH₂Cl₂ | ppm | <1 |
| SiH₃Cl | ppm | <1 |
| SiCl₄ | ppm | <1 |
NOTE : For other grade 99.99% , don’t hesitate to call or contact tao.hu@asiaisotope.com for more technical details.
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What are applications of Trichlorosilane (TCS) ?
Trichlorosilane (TCS) is a colorless, volatile liquid compound with the chemical formula HSiCl₃. It is a highly reactive and corrosive substance commonly used in the semiconductor industry for the production of silicon-based materials.
Trichlorosilane is a key precursor in the manufacturing of high-purity silicon and is used in processes such as chemical vapor deposition (CVD) to deposit thin layers of silicon on substrates, creating semiconductor devices like integrated circuits and solar cells. Additionally, TCS serves as a key raw material in the manufacturing of polysilicon, a pure form of silicon used in electronic components. In the field of solar photovoltaic (PV) cells, TCS is employed to deposit silicon layers that convert sunlight into electrical energy. Furthermore, TCS is utilized in the production of specialty chemicals, including silane gases, silicone polymers, and silane coupling agents, which find various applications in the semiconductor and electronics sectors.
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