Description
Product Name: Trifluoromethane Gas CHF3 Gas R23 HC-23
CAS: 75-46-7
Purity: 99.999 %
Product specifications: 4L/8L/10L/40L/47L/50L
Product form: Trifluoromethane Gas CHF3 Gas R23 HC-23
Main use: Trifluoromethane (CHF3): Used as a refrigerant and in the production of certain polymers.
Availability : In Stock
What is Trifluoromethane (CHF3)?
Trifluoromethane CHF3 gas has high density, low reactivity, and low toxicity, making it ideal for use in fire suppression systems as a flooding agent, for plasma etching in the semiconductor industry, specifically for silicon oxide and silicon nitride, and as a refrigerant.
Trifluoromethane (CHF3), also known as fluoromethane or HFC-23, is used in semiconductor etch applications as an alternative to sulfur hexafluoride (SF6) and other gases.
Certificate of Analysis
| Component | Unit | Specification |
| CHF3 | % | ≥99.9995 |
| O2+Ar | ppm | ＜0.50 |
| N2 | ppm | ＜2.00 |
| H2 | ppm | ＜0.30 |
| CO | ppm | ＜0.30 |
| CO2 | ppm | ＜0.30 |
| CH4 | ppm | ＜0.30 |
| OHC | ppm | ＜3.00 |
| H2O | ppm | ＜1.00 |
| Total Impurity Content | ppm | ＜5.00 |
| Acidity as HF | ppm | ≤0.10 |
NOTE : For other grade 99 % and 99.99%, dont hesitate to call or contact tao.hu@asiaisotope.com for more technical details.
We are profressional to offer Trifluoromethane CHF3 gas to the market over the past years to be qualified supplier of multinational companies, gaining their trust ranging from its quality / price / delivery. We know each parameters of product, to solve their questions on site , and pursuit to continue serving clients better.
To conduct our commitment of being a reliable partner to offer solutions when you need specialty gases & Chemicals. Visit us www.asiaisotopeintl.com.
What are applications of Trifluoromethane (CHF3) ?
- Trifluoromethane is a key component in refrigeration systems, especially those requiring low temperatures like commercial freezers, food processing and cold storage, transport refrigeration, and some air conditioning systems.
- It’s favored for its high cooling capacity and relatively low toxicity compared to other refrigerants.
- However, its use is declining due to its high global warming potential, with environmentally friendlier alternatives being adopted.
- Trifluoromethane is used as an etchant gas in the production of semiconductors.
- It selectively removes material from the surface of semiconductor wafers, and also acts as a cleaning agent to remove contaminants.
- Trifluoromethane serves as a fire extinguishing agent, particularly in sensitive environments like data centers and laboratories where traditional water-based systems might pose risks.
- Trifluoromethane is also used as a chemical intermediate in the production of other chemicals.
- It has historical uses as a propellant in medical aerosols.
- It is also used in the extraction of pesticides using supercritical fluids.
* * * Can’t Find What You Are Looking For ? Contact Us tao.hu@asiaisotope.com As We Still Might Be Able To Make It * * *
