Description
Product Name: Chlorine Trifluoride ClF3 Gas
CAS: 7990-91-2
Purity: 99.9 % ~ 99.995%
Product specifications: 4L/8L/10L/40L/47L/50L
Product form: Chlorine Trifluoride ClF3 Gas
Main use: Chlorine Trifluoride ClF3 is used in the production of certain chemicals and as an oxidizing agent.
Availability : In Stock
Certificate of Analysis
| Component | Unit | Specification |
| ClF3 | % | ≥99.9 |
| Oxygen | ppm | ≤ 20 |
| Nitrogen | ppm | ≤ 50 |
| Hydrogen Fluoride | ppm | ≤ 700 |
NOTE : For grade 99.99% , dont hesitate to call or contact tao.hu@asiaisotope.com for more technical details.
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Applications and Industries
In the semiconductor industry, chlorine trifluoride ClF3 is used to clean chemical vapour deposition chambers. chlorine trifluoride ClF3 has the advantage that it can be used to remove semiconductor material from the chamber walls without having to dismantle the chamber. Unlike most of the alternative chemicals used in this role, it does not need to be activated by the use of plasma since the heat of the chamber is enough to make it decompose and react with the semiconductor material
